Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy
نویسندگان
چکیده
Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure samples to energetic positively charged ions from gaseous plasma, providing specifics both surface- and gas-phase collision phenomena that are considered. The early stages developing GDOES the determination surface composition reviewed analyzed, stressing contribution authors. advantages as well drawbacks presented discussed. recent applications this various presented, directions constructing laboratory-scale device provided.
منابع مشابه
Radio Frequency Glow Discharge Optical Emission Spectroscopy Depth Profiling Analysis of Thin Anodic Alumina Films as Potential Reference Materials
s in any form of chemical analysis, the quality of information obtained from a depth profiling experiment is only as good as the reference materials that are used to calibrate the instrument. In the case of depth profiling, calibration must take place in terms of chemical composition as well as distribution with respect to the specimen surface. The nature of applications requiring such analyses...
متن کاملGlow Discharge Depth Profiling a Powerful Analytical Technique in Surface Engineering (TECHNICAL NOTE)
A variety of analytical techniques have been developed and employed to characterize the surfaces, subsurfaces and interfaces of surface engineering systems. They provide important information for quality control, process optimization and further development. Since the mid 1980's, glow discharge spectrometry (GDS) has emerged as an important and versatile technique for rapid depth profiling anal...
متن کاملLaser Micro-Raman Spectroscopy of CVD Nanocrystalline Diamond Thin Film
Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials. Due to its special optical properties (CrN) coated stainless steel substrates. NCD films have been investigated by laser micro-Raman spectroscopy. The fingerprint of diamond based materials is in the spectral region of 1000-1600 cm-1 in the first order of Raman scatter...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of vacuum science & technology
سال: 2023
ISSN: ['2327-9877', '0734-211X']
DOI: https://doi.org/10.1116/6.0002695