Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

نویسندگان

چکیده

Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure samples to energetic positively charged ions from gaseous plasma, providing specifics both surface- and gas-phase collision phenomena that are considered. The early stages developing GDOES the determination surface composition reviewed analyzed, stressing contribution authors. advantages as well drawbacks presented discussed. recent applications this various presented, directions constructing laboratory-scale device provided.

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ژورنال

عنوان ژورنال: Journal of vacuum science & technology

سال: 2023

ISSN: ['2327-9877', '0734-211X']

DOI: https://doi.org/10.1116/6.0002695